Facility for Printed Organic Electronics 

Organic and Metal Evaporator - Lesker Spectros 101

Organic and Metal Evaporator - Lesker Spectros 101

This Lesker evaporator on glovebox is designed to perform organic and metal evaporation by joule effect

  • deposition from 1 to few hundreds of nanometers
  • size of the substrate: 100 x 100mm², 15 x 15 mm², can be adapted for project
  • uniformity of deposition: <+/- 5%
  • 8 organics sources, co-evaporation possible
  • 3 thermal sources, co-evaporation possible
  • Substrate cooling and heating from -10°C to 80°C
  • Wedge tool allows deposition with gradient of thickness
  • Possibility to change shadow mask in process
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Cluster 3: Ultra High Vacuum systems for thin film deposition, characterization and batch fabrication


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