Facility for Printed Organic Electronics 

Organic and Metal Evaporator - Lesker Spectros 102

Organic and Metal Evaporator - Lesker Spectros 102

This Lesker evaporator on glovebox is designed to perform organic and metal evaporation by E-beam

  • deposition from 1 to few hundreds of nanometers
  • size of the substrate: 100 x 100mm², 15 x 15 mm², can be adapted for project
  • uniformity of deposition: <+/- 5%
  • 8 organics sources, co-evaporation possible
  • 4 E-beam sources
  • Substrate heating up to 350°C
  • Possibility to change shadow mask in process
Picture in categories
Cluster 3: Ultra High Vacuum systems for thin film deposition, characterization and batch fabrication


TOP