Facility for Printed Organic Electronics 

Cluster 3: Ultra High Vacuum systems for thin film deposition, characterization and batch fabrication

The function of this cluster is to obtain a fundamental understanding of organic semiconductors in their purest thin film form, as well as integrated with other materials, organic and/or inorganic. It is also used to fabricate devices by dry batch processes in ultra high vacuum environment and evaluate their performance.

Linear Transfer - SPECSLinear Transfer - SPECS

The linear transfer line allows to transport substrates from one deposition or measurement system to the other without breaking the vacuum. It has a pressure in the 10-9 mbar range.

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Metal Evaporator - Lesker mini SpectrosMetal Evaporator - Lesker mini Spectros

This Lesker evaporator, housed in a glovebox, is dedicated to metal evaporation. It has 4 thermal as well as 4 e-beam sources. deposition from 1 to hundreds of nanometers size of the substrate:...

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Organic and Metal Evaporator - Lesker Spectros 101Organic and Metal Evaporator - Lesker Spectros 101

This Lesker evaporator on glovebox is designed to perform organic and metal evaporation by joule effect deposition from 1 to few hundreds of nanometers size of the substrate: 100 x 100mm², 15 x...

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Organic and Metal Evaporator - Lesker Spectros 102Organic and Metal Evaporator - Lesker Spectros 102

This Lesker evaporator on glovebox is designed to perform organic and metal evaporation by E-beam deposition from 1 to few hundreds of nanometers size of the substrate: 100 x 100mm², 15 x 15...

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PVD System - Plassys MP 900SPVD System - Plassys MP 900S

This PLASSYS system is designed to perform physical vapor deposition of metal oxide and evaporate metal by E-beam. deposition from 1 to hundreds of nanometers size of the substrate: 100 x 100mm,...

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XPS / UPS / IPES - SPECSXPS / UPS / IPES - SPECS

This ultra-high vacuum measurement system is equipped with: X-ray source + monochromator X-ray source 2D Electron energy detector UV source Argon sputtering device Electron gun

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AFM / STM - SCIENTAOMICRON VT AFM XA 50/500AFM / STM - SCIENTAOMICRON VT AFM XA 50/500

This Omicron system has AFM as well as STM capabilities integrated in an ultra-high vacuum chamber. AFM : Z - resolution: < 0.01 nm scan range (xyz) : 10 ?m × 10 ?m × 1.5 ?m. STM...

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Atomic Layer Deposition - Ultratech SAVANNAH G2Atomic Layer Deposition - Ultratech SAVANNAH G2

This ALD system offers an accesible way for atomic layer deposition of metal oxide. Sample up to 8-inch diameter Precursor available: DI water and TMA (others can be installed upon request) Low...

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