Facility for Printed Organic Electronics 

Profilometer - Bruker Dektak XT-A

Profilometer - Bruker Dektak XT-A

This profilometer is used for layerthickness measurement and verification of small structures. It has an excellent precision over a large range of thicknesses and has several interesting options that make it a versatile and reliable tool. 

  • motorized x/y movement of 150 x 150mm and motorozed 360° rotation
  • 150 mm diameter vacuum chuck for rigid or flexible substrates
  • 50 um -> 55 mm travel distance
  • upto 1 mm height profiles can be measured
  • repeatability: 5A (=0,5nm)
  • stylus force: 0.05 <-> 15 mg
  • 3D mapping
Picture in categories
Cluster 4: Electrical, Optical and Spectroscopic Characterization


TOP