Spray / Spin coater - EVG101
The EVG101® spin- and spraycoater can be used for the preparation of uniform coatings of either active materials or photoresists. Spray coating works with low viscosity materials, using an ultrasonic atomizer nozzle; it coats even highly irregular surfaces and uses a very small quantity of material. Spin coating is a highly versatile method, tolerant to a large range of different solutions. The automatic dispenser arm allows to coat large badges of wafers with minimized wafer to wafer variation.
- Substrate diameters up to 200 mm in diameter
- Edge bead removal system
- Automatic syringe dispense with a <2 mL dead volume
- Picture in categories
- Cluster 1: Advanced instrumentation for top-down and bottom-up processing