Spray / Spin coater - EVG101

The EVG101® spin- and spraycoater can be used for the preparation of uniform coatings of either active materials or photoresists. Spray coating works with low viscosity materials, using an ultrasonic atomizer nozzle; it coats even highly irregular surfaces and uses a very small quantity of material. Spin coating is a highly versatile method, tolerant to a large range of different solutions. The automatic dispenser arm allows to coat large badges of wafers with minimized wafer to wafer variation.

• Substrate diameters up to 200 mm in diameter
• Edge bead removal system
• Automatic syringe dispense with a <2 mL dead volume