Cluster 1: Advanced instrumentation for top-down and bottom-up processing
This cluster is equipped for solution processing of organic semiconducting materials in the nano- or micro- structured form. Moreover the equipment allows the integration in various device architectures and system configurations.
The Jetlab 4 from Microfab is a single nozzle inkjet printer that can drive upto 4 printheads simultaneously. This tool is used for jetting tests on new ink formulations and the printing of small...[ read more ]
The EVG6200® mask aligner is a classic photolithography tool that has additional UV nanoimprint and microcontact printing capabilities. With the nanoimprint module, nanostructures with feature sizes...[ read more ]
The EVG101® spin- and spraycoater can be used for the preparation of uniform coatings of either active materials or photoresists. Spray coating works with low viscosity materials, using an ultrasonic...[ read more ]
Seven laminar flow hoods are available and equipped for wet chemical processing like deposition, development, wet-etching and lift-off. The integrated U15 filters and automated laminar flow assure...[ read more ]