Université de Bordeaux
ELORPrintTecEquipment of Excellence
Cluster of excellence

Linear Transfer - SPECS

Linear Transfer - SPECS

The linear transfer line allows to transport substrates from one deposition or measurement system to the other without breaking the vacuum. It has a pressure in the 10-9 mbar range.

Picture in categories
Cluster 3: Ultra High Vacuum systems for thin film deposition, characterization and batch fabrication


TOP