Metal Evaporator - Lesker mini Spectros
This Lesker evaporator, housed in a glovebox, is dedicated to metal evaporation. It has 4 thermal as well as 4 e-beam sources.
- deposition from 1 to hundreds of nanometers
- size of the substrate: 100 x 100mm or 15 x 15 mm, can be adapted depending on requirements
- uniformity of deposition: <+/- 5% for 100x100mm
- co-evaporation for thermal sources possible
- substrate heating up to 150°C