Université de Bordeaux
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Metal Evaporator - Lesker mini Spectros

Metal Evaporator - Lesker mini Spectros

This Lesker evaporator, housed in a glovebox, is dedicated to metal evaporation. It has 4 thermal as well as 4 e-beam sources.

  • deposition from 1 to hundreds of nanometers
  • size of the substrate: 100 x 100mm or 15 x 15 mm, can be adapted depending on requirements
  • uniformity of deposition: <+/- 5% for 100x100mm
  • co-evaporation for thermal sources possible
  • substrate heating up to 150°C
Picture in categories
Cluster 3: Ultra High Vacuum systems for thin film deposition, characterization and batch fabrication


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