Organic and Metal Evaporator - Lesker Spectros 102
This Lesker evaporator on glovebox is designed to perform organic and metal evaporation by E-beam
- deposition from 1 to few hundreds of nanometers
- size of the substrate: 100 x 100mm², 15 x 15 mm², can be adapted for project
- uniformity of deposition: <+/- 5%
- 8 organics sources, co-evaporation possible
- 4 E-beam sources
- Substrate heating up to 350°C
- Possibility to change shadow mask in process