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Université de Bordeaux
ELORPrintTecEquipment of Excellence
Cluster of excellence
 

Organic and Metal Evaporator - Lesker Spectros 102

Organic and Metal Evaporator - Lesker Spectros 102

This Lesker evaporator on glovebox is designed to perform organic and metal evaporation by E-beam

  • deposition from 1 to few hundreds of nanometers
  • size of the substrate: 100 x 100mm², 15 x 15 mm², can be adapted for project
  • uniformity of deposition: <+/- 5%
  • 8 organics sources, co-evaporation possible
  • 4 E-beam sources
  • Substrate heating up to 350°C
  • Possibility to change shadow mask in process