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Université de Bordeaux
ELORPrintTecEquipment of Excellence
Cluster of excellence
 
WelcomeFacilityCluster 3: Ultra High Vacuum systems for thin film deposition, characterization and batch fabrication

XPS / UPS / IPES - SPECS

XPS / UPS / IPES - SPECS

This ultra-high vacuum measurement system is equipped with:

  • X-ray source + monochromator
  • X-ray source
  • 2D Electron energy detector
  • UV source
  • Argon sputtering device
  • Electron gun
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Cluster 3: Ultra High Vacuum systems for thin film deposition, characterization and batch fabrication