Profilometer - Bruker Dektak XT-A

This profilometer is used for layerthickness measurement and verification of small structures. It has an excellent precision over a large range of thicknesses and has several interesting options that make it a versatile and reliable tool. 

• motorized x/y movement of 150 x 150mm and motorozed 360° rotation
• 150 mm diameter vacuum chuck for rigid or flexible substrates
• 50 um -> 55 mm travel distance
• upto 1 mm height profiles can be measured
• repeatability: 5A (=0,5nm)
• stylus force: 0.05 <-> 15 mg
• 3D mapping