This Omicron system has AFM as well as STM capabilities integrated in an ultra-high vacuum chamber. AFM : Z - resolution: < 0.01 nm scan range (xyz) : 10 ?m × 10 ?m × 1.5 ?m. STM : tunnelling current: < 1pA - 330 nA scan range (xyz) : 12 ?m × 12 ?m × 1.5 ?m Variable temperature operation in microscope stage : from 80 to 500K.
Cluster 3: Ultra High Vacuum systems for thin film deposition, characterization and batch fabricationTuesday 12 July 2016 by skhiev@enscbp.fr. Last update Thursday 21 July 2016This PLASSYS system is designed to perform physical vapor deposition of metal oxide and evaporate metal by E-beam. deposition from 1 to hundreds of nanometers size of the substrate: 100 x 100mm, 15 x 15 mm, can be adapted on request 4 E-beam sources 3 positions of sputtering: 3 target of 3 inch with adjustable tilt 2 target of 2 inch 2 target face to face ion gun for in-situ etching substrate...
Cluster 3: Ultra High Vacuum systems for thin film deposition, characterization and batch fabricationTuesday 12 July 2016 by SMAAL Willem. Last update Thursday 21 July 2016This ALD system offers an accesible way for atomic layer deposition of metal oxide. Sample up to 8-inch diameter Precursor available: DI water and TMA (others can be installed upon request) Low temperature processing: 180°C max
Cluster 3: Ultra High Vacuum systems for thin film deposition, characterization and batch fabricationTuesday 12 July 2016 by SMAAL Willem. Last update Thursday 21 July 2016The linear transfer line allows to transport substrates from one deposition or measurement system to the other without breaking the vacuum. It has a pressure in the 10 -9 mbar range.
Cluster 3: Ultra High Vacuum systems for thin film deposition, characterization and batch fabricationTuesday 28 June 2016 by SMAAL Willem. Last update Wednesday 20 July 2016This Buchi system allows you to purify the crude product from your chemical reaction in a fast and accurate way. Injection of liquid or solid Crude weight: up to 40g for solid or 140mL for liquid Pressure max: 15 bars Detector with 3 wavelengths between 200 to 850 nm Detector ELSD Cartridge: from 4 to 1500g
Cluster 2: Synthesis and FormulationTuesday 12 July 2016 by skhiev@enscbp.fr. Last update Wednesday 20 July 2016There are 6 chemical fumehoods, conform with strict safety norms and equipped with: nitrogen and argon process gasses pressure regulated (upto 6 bar) primary vacuum (10^-2 mbar) recycled cooling water (10°C)
Cluster 2: Synthesis and FormulationTuesday 28 June 2016 by SMAAL Willem. Last update Wednesday 20 July 2016